Company Profile

Ultratech Inc (AKA: Ultratech Stepper Inc)
Profile last edited on: 10/28/22      CAGE:       UEI:

Business Identifier: Photolithography and laser thermal processing equipment
Year Founded
First Award
Latest Award
Program Status
Inactive (Acquired)
Popularity Index
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Location Information

3050 Zanker Road
San Jose, CA 95134
   (408) 321-8835
Location: Single
Congr. District: 17
County: Santa Clara

Public Profile

Publicly traded before they were SBIR involved with the extent of that involvement very small, Ultratech, Inc. -- formerly dba Ultratech Stepper Inc - works in the space of photolithography, laser thermal processing, and inspection equipment. Withthe deal announcedin February 2017 but not consummated until May, the firm was acquired by Veeco Instruments. Ultratech supplies step-and-repeat photolithography systems based on one-to-one imaging technology for semiconductor device and nanotechnology manufacturers. The company’s products include the 1000 series consisting of Sapphire 100 and Sapphire 100E for high-brightness light emitting diodes (HBLED), semiconductor fabrication, and nanotechnology applications; and AP series for advanced packaging applications. It also offers a family of laser-based thermal annealing tools, such as LSA100A, LSA101, LSA101LP, LSA201, and LSA201LP that are used by the semiconductor industry for various process steps, including activation of implanted impurities, dopant activation, dielectric film formation, formation of silicides, and stabilization of copper grain structures. In addition, the company provides Superfast 3G, an in-line wafer inspection system for the inspection of various critical semiconductor inspection steps. Ultratech, Inc. sells its systems to semiconductor, advanced packaging, HBLED, thin film head, and various other nanotechnology manufacturers in North America, Europe, and Asia.

Extent of SBIR involvement

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Synopsis: Awardee Business Condition

Employee Range
Revenue Range
VC funded?
Publicly Traded
Stock Info
IP Holdings

Awards Distribution by Agency

Most Recent SBIR Projects

Year Phase Agency Total Amount
1994 1 DARPA $99,996
Project Title: P-GILD In Situ Monitor

Key People / Management

  Arthur Zafiropoulo -- President

  Dave Markle

Company News

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