SBIR-STTR Award

This Small Business Innovation Research (SBIR) Phase I research project will demonstrate the feasibility of manufacturing large-throw, optically flat, high resolution and fast response-speed deformable mirrors (DM). The DM is a critical component in adaptive optics, which can be applied to improve medical imaging technology. The device consists of Segmented Membrane Arrays (SMA) and bottom electrodes with Backside Solder Bump (BSB) fabricated by micromachining technology. The design will use arrays of mirror pixels to eliminate the cross talk between adjacent elements. The mirror pixels will be made of stress-free single crystalline silicon (SCS) to ensure optically flat surfaces. The commercial application of this project will be in a number of areas, including bio imaging instruments, telescope systems, 3D data storage systems and free-space optical communications

This Small Business Innovation Research (SBIR) Phase II research project will advance the state of the art in MEMS deformable mirror arrays. The research will address the key technology bottlenecks in the production of affordable, high performance adaptive optics systems. The objective is to further expand the proof of concept and to successfully fabricate and package the MEMS arrays. The mirror arrays will play a key part in the understanding, diagnoses, and treatment of the leading causes of progressive vision deterioration and blindness in humans. Having improved retinal resolution will allow physicians to detect diseases and prescribe treatment earlier than current technologies allow. This will allow for increased preservation of eyesight and increase in lifestyle. Further, improved resolution will allow for increased research into various pathologies for additional scientific and medical advancement in a more efficacious time frame