SBIR-STTR Award

The goal of the proposed project is the development of improved sensors for the detection of hydrides (including arsine, phosphine and diborane) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers about the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety. This project will take advantage of advances in nanotechnology, ceramic micromachining and materials chemistry to create sensors that are substantially better than current state of the art. These improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry. Hydrides are dangerous gases that are widely used in the semiconductor industry. The proposed project will develop advanced sensors that can be used in personal protective devices to warn users about the presence of these highly toxic gases.

Thesaurus Terms:
There Are No Thesaurus Terms On File For This Project.

Development of improved detectors for the detection of hydrides (including arsine, phosphine and diborane) will provide an increase in the protection of worker health and safety. This Phase II proposal aims to develop and demonstrate a prototype gas detection system capable of affordably and reliably detecting toxic gases at low ppb levels. Drawing upon advances in nanotechnology, micromachining and materials chemistry, the Phase I proposal demonstrated the feasibility of creating electronic sensors that are substantially better than current state of the art for hydrides detection. These improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry and other applications. Furthermore, the development of these highly innovative, sensitive and selective sensors will lay the groundwork for the development of additional sensors for detecting a wide range of chemical hazards that exist in the workplace today.

Public Health Relevance:
Hydrides are dangerous gases that are widely used in the semiconductor and other industries. The proposed project will develop advanced sensors that can be used in personal protective devices to warn users about the presence of these highly toxic gases.

Thesaurus Terms: