Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators with size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, considerable development is necessary to take state-of-the-art MEMS DMs and make them flight-like for wavefront control in coronagraphs for exoplanet detection. This Phase I research proposal will begin development of a 1015-segment MEMS DM. It will result in a completed CAD layout of the DM, a conceptual package design, a conceptual electrical probe card design, and the fabrication of a key layer in the actuator process to demonstrate high-resolution field-stitched photolithography. The ultimate goal is to develop flight-like hardware based on Iris AO�s proven hybrid MEMS DM technology. The increased spatial resolution afforded by the development here will enable picometer resolution DMs required to reach 10^10 contrast levels necessary for direct detection of Earth-sized terrestrial planets.
