Most ion beam make use of nitrogen ion meams. Besides nitrogen other ion species may be required, inlcuding metal ion and mixed ion beams. Additinally, intensively investigated anywhere Ion-Beam Enhanced Deposition (IBED) techniques requires at least two ion sources and has restrictions for commercial application. The goal of this program is to improve ciritical surface parts of space and missile structures to be developed. The versatile vacuum are source TAMEK operated in a frequency pulsed module implantation Ei<200keV, dDi/dt<10^6 ion/cm^2 per minute, or deposition dH/dt-50-2 nm/min. If desired, metal ion implantation , deposition, or metal Ion-Beam Assisted Deposition (IBAD) can be performed without switching of the source. The TAMEK sourse can be used successfully for IBAD treatment of metals, composite materials, ceramics, glass, plastics, and polymers. Compact modular design the TAMEK technique together with the efficiency of surface treatment will increase the affordability of many military and civilian manufactures.
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