At the present time, GaN films have residual hydrogen. Hydrogen free films of superior electrical properties can be grown by MBE, but the growth rates are slow, the process is expensive and the capital equipment is very expensive. Phase I demonstrated the viability of producing hydrogen free single crystal GaN films. The process can operate at 200 to 300 degrees Celsius lower temperature than the CVD or MOCVD systems. Phase II proposes to scale up the process to enable growth of large area, high quality GaN with controlled electrical and optical properties. This process is expected to provide a low cost method for obtaining large area, single crystal films of GaN which are free of hydrogen and which would have superior electrical properties and device performance. Availability of hydrogen free GaN films in R&D and productions quantities for development and production of LEDs, lasers, detectors, non-volatile memories, high temperature devices and high frequency-high speed devices and ICs.