High density wafer scale cryogenic probing solution for testing at 4.5K temperatures or below is needed for testing and characterization of devices and circuits employing superconducting electronic components (such as used for quantum processing, high speed classical processing, magnetic field sensors, etc.) as well as for testing of various particle and light detectors for astronomy, aerospace, defense and homeland security applications. MicroXact Inc. is proposing to continue the development of a semi-automated, closed cycle, wafer scale high density cryogenic probe station for testing at below 4.5K to 300K. In Phase I MicroXact finalized the performance specifications, developed mechanical model and design, and verified system performance via simulations. Detailed commercialization and transition to marketing strategy was also developed. In Phase II MicroXact will fabricate, assemble and test the prototype high density closed cycle semi-automated cryogenic probe station first in-house and then will deliver and install the prototype at the NIST facility for verification and evaluation. Upon completion of Phase II, a prototype closed cycle refrigerated high density cryogenic probe station will be delivered to NIST for testing and verification. The solution developed on this SBIR project will be commercialized immediately after Phase II completion.
