The inherent advantages of MEMS technology, including small size and cost-effective fabrication, make it ideal for numerous application in a wide range of industries ranging from defense, automotive, medical, to consumer industries. For applications that require self-powered MEMS electronics, an integrated energy storage device is required. Due to their small size, excellent cycle life and high power density, miniature supercapacitors are an excellent choice for such an integrated energy storage device. The development of electrode materials and electrode fabrication processes for supercapacitors are thus critical for the practical applications of MEMS technology in electronics. This program will first identify the challenges and tradeoffs of the various pseudocapacitive coatings for CNT-based MEMS supercapacitors. A novel 3D graphenated carbon nanotube (g-CNT) network with pseudocapacitive coatings will be employed as the electrode materials for fabricating high energy density MEMS supercapacitors. These hybrid graphene-CNT materials have been shown to be exceptional frameworks to achieve excellent supercapacitance. An economical and scalable electrophoretic deposition approach will be used for fabrication, in iteration with the electrochemical performance evaluation. The ultimate goal will be to optimize the electrode synthesis process to develop high energy density MEMS supercapacitors for energy harvesting applications that meets DMEAâs needs
