SBIR-STTR Award

Low Cost, Sub-32nm Hybrid Imprint & E-beam Template for Low-Volume Manufacturing
Award last edited on: 7/8/2010

Sponsored Program
SBIR
Awarding Agency
DOD : DARPA
Total Award Amount
$98,984
Award Phase
1
Solicitation Topic Code
SB082-043
Principal Investigator
Linshu Kong

Company Information

Nanonex Corporation

1 Deer Park Drive Suite O
Monmouth Junction, NJ 08852
   (732) 355-1600
   N/A
   www.nanonex.com
Location: Single
Congr. District: 12
County: Middlesx

Phase I

Contract Number: ----------
Start Date: ----    Completed: ----
Phase I year
2009
Phase I Amount
$98,984
In order to diminish the second corollary of Moores Law (the cost of the manufacturing technology increases geometrically with time), Nanonex proposes the use of templates with gratings that can be manufactured at a low-cost by nanoimprint lithography (NIL). These templates are base wafers prefabricated and awaiting customization and can formed into the desired circuits by trimming or stitching these repetitive structures using EBL. The use of such templates will significantly reduce both costs and design cycles, and provide the basis for cost effective nano-scale electronics for niche applications. NIL is uniquely well suited for producing such templates.

Keywords:
Nanoimprint, Nil, Lithography, Template, Qun, Ebl, Ebeam

Phase II

Contract Number: ----------
Start Date: ----    Completed: ----
Phase II year
----
Phase II Amount
----