We propose an AFM system that images orders of magnitude faster than conventional AFMs, yet maintains the same horizontal and vertical resolutions. This system will operate in both the contact and intermittent contact mode. It will optimize the AFM's operation, and it will give engineers active control over imaging dynamics. The composite system will allow researchers to probe sub-nanometer scale phenomena, over micron scale topography, at speeds never before accessible. The technical approach directly assaults the fundamental rate limiting parameters of the AFM: 1) the piezotube's resonance, and 2) the quality factor (Q) of the oscillating cantilever. By fabricating a microelectrical mechanical system (MEMS) onto the AFM's sensing element, these two problems can be simultaneously overcome. The Semiconductor Industry Association's Roadmap explicitly calls out the AFM as technology that can solve many metrology issues that currently have "no known solution". This is provided that issues of AFM throughput, metrology, and tip wear are appropriately addressed. If the objectives put forward in this Phase II proposal are successful, for the first time, a platform that is capable of meeting the industry's needs for high resolution, large z-range, high speed, reliable atomic force microscopy will be available.
Keywords: Atomic Force Microscopy; Piezoelectric Actuator; MEMS Actuator; Active Damping; High Speed Imaging
