SBIR-STTR Award

  1. You are here:    Home
  2. Search Databases
  3. Search SBIR-STTR Awards
  4. SBIR-STTR Award

Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication
Award last edited on: 7/12/2002

Sponsored Program
SBIR
Awarding Agency
DOD : DARPA
Total Award Amount
$59,853
Award Phase
1
Solicitation Topic Code
DARPA93-018
Principal Investigator
William M Ayers

Company Information

Electron Transfer Technologies

Po Box 5812 155 Campus Plaza
Edison, NJ 08818
   (732) 225-3995
   wmaett@aol.com
   www.pingsite.com/ett
Location: Single
Congr. District: 06
County: Middlesx

Phase I

Contract Number: ----------
Start Date: ----    Completed: ----
Phase I year
1994
Phase I Amount
$59,853
A point of use generator for hydrogram selenide (H2Se) gas production is proposed. The generator would greatly decrease the safety risk of wafer fabrication with the toxic gas while providing higher purity gas than is now available for semiconductor fabrication. Anticipated

Benefits:
The H2Se generator would find applications in the production of ZnSe light emitting diodes, CdSe and CdInSe optoelectronic devices, and as a Se doping source for diamond thin films.

Phase II

Contract Number: ----------
Start Date: ----    Completed: ----
Phase II year
----
Phase II Amount
----