Plasmaquest, Inc. Proposes a number of improvements to the plasmaquest free radical reactor based on our recent experience with etching mercury cadmium telluride (MCT) for the u.s. Army center for night vision and electro-optics. Reactor improvements and process optimizations include: minimization of workpiece exposure to undesireable uv light and thermal ion bombardment, exploration of the use of alternate free radical chemistries, and etching at a lower operating temperature. Anticipated benefits/potential commercial applications - free radical etching is a vacuum-compatible process. As such, this etching approach can be integrated with other vacuum processes to manufacture ir detectors in a fully integrated vacuum environment. The proposed process and reactor improvements offer the potential to reduce ir detector fabrication costs and improve yield.
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