SBIR-STTR Award

InertialWave, Inc. will complete the design and analysis of a Dual Resonant Beam Accelerometer in MEMS vacuum wafer level package process integrated with IWs navigation grade frontend ASIC controller in Phase I.IW will further demonstrate feasibility through analysis and testing of the DRBA design with the ASIC controller to achieve navigation grade performance in a small volume (MEMS,Accelerometer,Vibrating Beam Accelerometer,Navigation,Inertial measurement unit,silicon,quartz

InertialWave, Inc. will initially complete the fabrication and testing of an optimized MEMS Dual Resonant Beam Accelerometer designed in Phase I to meeting navigation grade performance requirements in a high-performance MEMS inertial sensor foundry process. Further design enhancements will be identified during testing and incorporated into the DRBA. The enhanced MEMS DRBA will then be fabricated and integrated into a multi axis mechanical assembly with IW’s navigation grade frontend ASIC-based electronics controller electronics to demonstrate significantly reduced size, weight, and power. Testing will be conducted to assess navigation grade performance in representative Army environments. The end of this project will result in a TRL6 navigation grade MEMS accelerometer with industry leading size, weight, and power. The DRBA data interface will be designed to support legacy system interfaces and emerging DoD PNT standards making it ready for rapid evaluation and transition to enhance current and future DoD systems.