Kionix proposes a Phase I program to study the feasibility of using thick film microelectromechanical systems (MEMS) to create an integrated, scalable, tunable electronic filter. MEMS has been used previously to fabricate variable capacitors. Novel metal deposition processes have been employed to fabricate prototype micro-inductors. However, neverhave the two disciplines been integrated in a manufacturable process to produce a fully functional filter device. Silicon MEMS will providethe actuating functions to alter the frequency of the tunable filter,while the electroless deposition of thick film metals will provide low loss rf coupling through and between the inductor and capacitor pair. This configuration ensures that the filter operates with low insertion loss, high tuning range, and high isolation to the substrate silicon.
Benefits: This proposed SBIR program will create a new methodology for tunable filters for application in communications transceivers, in both military and commercial applications.
