Current gas turbines and turbine components utilize robust Ni-based superalloys. Harsh operating conditions such as corrosive environments and high temperatures result in superalloy fatigue and failure due in part to fractured (cracked) surfaces and subsequent oxide film growth, all detrimental to critical parts performance and longevity. For these reasons, there is a strong need to develop a super-alloy oxide removal method allowing for failure analysis testing and routine cleaning of Ni-based superalloy structures. Through this Phase I effort, SMP plans on developing a selective, dry chemical etching process. This process will have the ability to selectively dry etch superalloy oxide films from the internal fracture surface while leaving the non-oxidized metal alloy surface untouched. SMP plans to utilize its experience in chemical processing and precursor design to develop novel, tailored chemical approaches for superalloy oxide etching. The successful completion of this effort will result in an etching methodology which affords an opportunity to conduct failure analysis experiments and routine cleaning of critical Ni-based superalloy systems