Working on development of a new beam technology for advanced lithography applications, Digibeam, has demonstrated the ability to shoot a particle beam through a slow wave RF structure to create a train of compressed beam packets for high-throughput lithography. SBIR funding early in the process proved the core technology, with Digibeam since 2011 self-fundeding s at sub-30nm with designs to support well below 10nm. Digibeam has effectively integrated an old technology onto a stable single beam lithography platform. Assembling a bandgap for graphene Graphene is a honeycomb lattice made of carbon. The 2D material is strong and conducts electricity, but graphene also lacks a bandgap. This has prevented graphene from becoming a mainstream technology for semiconductor devices. Digibeam's approach addresses this limitation.
