Space Mechanism testing often requires precision motion control in a cryogenic and high vacuum environment. Precision position devices that can provide motion over large distances and with relatively high forces are required. DSM proposes a revolutionary piezoelectric motorized stage that is cryogenic and vacuum compatible to provide positioning and motion control for Air Force requirements in space mechanism testing. The motorized stage design represents an innovative mechanism topology that is universal in configuration such that it can be incorporated into a variety of precision instrumentation and metrology environments. Representing a novel step and repeat or walking beam motor, DSMs design provides a number of key benefits over traditional electromagnetic driven stages. The piezoelectric motorized stage operates in cryo without any lubrication or rolling components. The technology uses very simple solid state flexure mechanisms to provide high force (600 lbf) in a relatively small cryo compatible package. With an inherently precise fit and geometry, the stage will achieve nanometer level resolution and stability. This proposal addresses DSMs perceived approach to the development of space qualified demonstration components.
Keywords: Piezoelectric Motor, Cryo/Vacuum Stage, Motion Control, Vacuum Compatible Motor, Mems, Semiconductor, Inspection, Test And Measurement