Date: Sep 28, 2011 Source: Company Data (
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Currently, there are no generally accepted standards relating to high density microfluidic interfaces. Details are needed for designing interfaces between fluidic routing cards, electrofluidic MEMS devices, and circuit boards. The SEMI MS9 standard, published June 2011, was developed to define a minimal set of parameters that must be specified in order to design a component or interface.
"SEMI MS9-0611 was developed to reduce redundant design time, enable more rapid miniaturization of MEMS systems, reduce system complexity, and decrease cost through standardized interfaces," said Paul Trio, Senior Manager of Standards Operations at SEMI. "This Standard will promote the development of MEMS microfluidics manufacturing and commercialization."
"Our company is excited about new opportunities that will come due to the new Standard," said Mark Tondra, President of Diagnostic Biosensors. "It will allow us to focus on developing our core sensor + fluidics products, and work collaboratively with other companies in our MEMS - microfluidics marketplace. This kind of benefit happens best through the systematic development of Industry Standards through organizations like SEMI."