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LumArray Inc

Profile last edited on: 9/18/2018
15 Ward Street
Somerville, MA 02143
  (617) 253-6865
Business Identifier: Maskless Optical Lithography
Public Profile:
Lumarray is a lithography company whose technology, Zone-Plate-Array Lithography (ZPAL), integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the future. Lumarray provides a completely new way of doing lithography that will be advantageous in terms of cost and flexibility. The firm is working to commercialize a high-throughput maskless lithography tool that would allow for the possibility to transfer a design drawn on a computer screen directly onto a substrate. ZPAL technology is extendable to many future generations of semiconductor devices and should be capable of reaching the absolute limits of the lithographic process. The firm was founded in 2002, originally as an LLC and later converted to a corporation. Its a spinoff from the NanoStructures laboratory at MIT, which was founded in 1977 by Prof. Henry I. Smith, President of LumArray. LumArray's expertise is derived from over 40 years of forefront research on lithography at MIT.

 Synopsis: Awardee Business Condition
Year Founded First SBIR Year Date of Last Award
Employee Range VC funded? IP Holdings
Revenue Range Private/Public Exchange/Symbol :

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