Company Profile

LumArray Inc (AKA: Lumarray LLC)
Profile last edited on: 3/6/20      CAGE: 3MFX1      UEI: T2HXT55KVA34

Business Identifier: Maskless Optical Lithography
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Location Information

15 Ward Street
Somerville, MA 02143
   (617) 253-6865
Location: Single
Congr. District: 07
County: Middlesex

Public Profile

Lumarray is a lithography company whose technology - Zone-Plate-Array Lithography (ZPAL) - integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the future. Offering a completely new way of doing lithography - advantageous in terms of cost and flexibility - the firm is working to commercialize a high-throughput maskless lithography tool that would allow for the possibility of transfering a design drawn on a computer screen directly onto a substrate. ZPAL technology is extendable to many future generations of semiconductor devices and should be capable of reaching the absolute limits of the lithographic process. The firm had originally spun out of the MIT NanoStructures laboratory that was itself founded some 25 years earlier by the President of LumArray - Prof. Henry I. Smith.

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Synopsis: Awardee Business Condition

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Privately Held
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Key People / Management

  Henry I Smith -- President and acting CEO

  Bernard Alamariu

  Juan Ferrera -- Senior Researcher

  Rajesh Menon -- Co-founder

  Timothy Savas -- Chief Research Scientist

  Henry Smith

  Michael Walsh -- CTO

  Feng Zhang -- Vice President of Research

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