Company Profile

Active Impulse Systems Inc
Profile last edited on: 9/12/2012      CAGE:       UEI:

Business Identifier: NO Business Identifier is currently available for this company.
Year Founded
First Award
Latest Award
Program Status
Inactive (Acquired)
Popularity Index
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Location Information

12 Michigan Drive
Natick, MA 01760
   (508) 655-1615
Location: Single
Congr. District: 05
County: Middlesex

Public Profile

Acquired in August 1998 by Philips, the firm is now known as Advanced Metrology Systems, Inc. (Philips AMS) a division of Philips Electronics, Inc.. The firm manufactured high-throughput, non-contact metal film thickness measurement tools for online monitoring of interconnect layers in advanced semiconductor processes. The firm was founded on technology licensed from the Massachusetts Institute of Technology in August 1998. The company has as its core mission the development of copper/low-k interconnect metrology solutions

Extent of SBIR involvement

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Synopsis: Awardee Business Condition

Employee Range
Revenue Range
VC funded?
Privately Held
Stock Info
IP Holdings

Awards Distribution by Agency

Most Recent SBIR Projects

Year Phase Agency Total Amount
1997 2 NSF $457,086
Project Title: Process-Control Instrument for Multi-Chamber Platforms

Key People / Management

  Matthew J Banet

Company News

There are no news available.