The primary objective of Enertia Microsystems Inc.s (EMI) Open Topic SBIR project is to develop a high-precision, lightweight Micro Electromechanical Systems (MEMS) gyroscope for inertial measurement units (IMU) for navigation systems for the United States Air Forces (AF) and the United States Space Forces (SF) existing and future small and lightweight spacecrafts, satellites, and drones. The Birdbath Resonator Gyroscope (BRG) is novel high-precision micro gyroscope technology developed from DARPA programs. The micro birdbath resonator has a similar design principle and is made with the same material as the wineglass resonator the Hemispherical Resonator Gyroscope (HRG) which is a state-of-art macro-scale vibratory gyroscope with navigational-grade performance. We propose to develop a novel electrode integration process for silicon capacitive to form precise and uniform gaps around the birdbath resonator to form large and uniform readout-and-control capacitance and a batch-level resonator trimming process. The electrode integration process will allow Si electrodes to be built at a uniform and large capacitance around 1 pF. The new resonator mechanical trimming technology will reduce the n=2 wine-glass mode frequency difference to a small value (e.g. 0.5 Hz) in a batch mode. We propose to develop and deliver the working prototypes of the BRG to our customer and end-user, the Space Vehicle Directorate at the Kirtland Air Force Base.
