Company Profile

Modular Process Technology Corporation
Profile last edited on: 9/1/05      CAGE: 0XJ50      UEI:

Business Identifier: NO Business Identifier is currently available for this company.
Year Founded
1991
First Award
1993
Latest Award
1993
Program Status
Inactive
Popularity Index
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Location Information

2233 Paragon Drive
San Jose, CA 95131
   (408) 325-8640
   N/A
   www.modularpro.com
Location: Single
Congr. District: 17
County: Santa Clara

Public Profile

Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP systems, and stand alone UV Ozone Cleaning Systems. There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration.

Extent of SBIR involvement

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Synopsis: Awardee Business Condition

Employee Range
20-24
Revenue Range
2M-2.5M
VC funded?
No
Public/Private
Privately Held
Stock Info
----
IP Holdings
1-4

Awards Distribution by Agency

Most Recent SBIR Projects

Year Phase Agency Total Amount
1993 1 DARPA $49,923
Project Title: All-dry Photoresist and Wafer Cleaning Techniques

Key People / Management

  Meiying Forney -- President

  Steven Shatas

Company News

There are no news available.