Science Research Laboratory, Inc. (SRL) is a technological research and development corporation longtime SBIR-STTR Involved andhaving broad technology capabilities including: electron beam curing of composite materials, plasma x-ray generation for advanced microlithography, Dual-Energy Digital Subtraction Angiography, and new approaches to hematopoietic stem cell isolation. Through an exclusive licensing agreement, the company has supplied all-solid-state krypton-fluoride (KrF) laser driver technology to Cymer, Inc., the world's leading supplier of excimer lasers for sub-0.35-micron lithography. These drivers are now used with lithographic tools manufactured by Canon, Nikon, and Silicon Valley Group in the production of semiconductors. The technology has dramatically reduced the annual operating cost of KrF lasers used in optical lithography. SRL is also working with SEMATECH, a consortium of leading semiconductor manufacturers, to provide technological improvements for the next generation of argon-fluoride (ArF) lasers to be used in sub-0.25 microlithography.
