SBIR-STTR Award

Fabrication Technology for Oxide Film Heterostructure Devices
Award last edited on: 6/25/2010

Sponsored Program
STTR
Awarding Agency
DOD : AF
Total Award Amount
$850,000
Award Phase
2
Solicitation Topic Code
AF08-BT22
Principal Investigator
Nick M Sbrockey

Company Information

Structured Materials Industries Inc (AKA: Nanopowders Enterprises~SMI)

201 Circle Drive North Units 102-103
Piscataway, NJ 08854
   (732) 302-9274
   sales@structuredmaterials.com
   www.smicvd.com

Research Institution

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Phase I

Contract Number: ----------
Start Date: ----    Completed: ----
Phase I year
2009
Phase I Amount
$100,000
In this STTR program, Structured Materials Industries, Inc. (SMI) and our STTR partners will develop commercially viable fabrication technology for oxide heterostructure based nano electronic devices.  Oxide heterostructure devices, consisting of a polar oxide such as LaAlO3 and a non-polar oxide such as SrTiO3, offer a novel route to nano devices.  Although the initial concepts for 2 DEG oxide heterostructures have been demonstrated, the critical fabrication technology to build these devices at nanometer dimensions is still needed.  This STTR will address this critical need, and develop film deposition technology for high-quality, crystalline polar oxide films, with mono-layer thickness control.  Although the primary program emphasis will be on film deposition, we will also address issues for patterning and contact formation, as enabling technology to demonstrate fully functional prototypes in Phase II. BENEFIT

Keywords:
Heterostructures, Nano Electronics, Oxides, Thin Films, Epitaxy, 2-D Electron Gas, Non-Volatile Memory

Phase II

Contract Number: ----------
Start Date: ----    Completed: ----
Phase II year
2010
Phase II Amount
$750,000
In this STTR program, Structured Materials Industries, Inc. (SMI) and our partners are developing commercially viable fabrication technology for oxide heterostructure based nanoelectronic devices. Oxide heterostructures, consisting of a polar oxide such as LaAlO3 and a non-polar oxide such as SrTiO3, offer a novel route to building nanoelectronic devices. The benefits of these devices will include high information density, high speed, low power requirements, and the ability to operate in extreme environments of temperature and radiation. Prior research on oxide heterostructures was done using films deposited by pulsed laser deposition (PLD). In this STTR program, our technical approach uses Atomic Layer Deposition (ALD) to deposit the active materials. ALD has several advantages over competing PLD processes for fabricating all types of nanoelectronic devices, including, excellent control of film composition and thickness, excellent thickness uniformity over large wafer sizes, compatibility with nanoelectronic fabrication techniques, low cost-of-ownership and scalability to high volume production. In Phase I, our team demonstrated technical feasibility of producing oxide heterostructure devices, based on ALD of LaAlO3 thin films. In Phase II, we will build on these accomplishments and extend the technology to actual devices.

Benefit:
Transistors based on oxide heterostructures should be scalable to nano-dimensions, with corresponding improvements in speed and reduced power requirements. Oxide heterostructure transistors should also exhibit low noise, excellent high temperature performance and inherent radiation hardness, due to the fact that the active materials are wide bandgap oxides. Oxide heterostructure based memory devices would also exhibit high speed, low power requirements, high information density and inherent radiation hardness compared to present state of the art memory devices. In addition to logic and memory devices, we envision many other potential applications for oxide heterostructure devices, including high sensitivity radiation detectors, spintronic and related quantum computing devices, superconducting devices and proximity superconductivity devices. Our technical approach is to develop practical and economical fabrication technology for oxide heterostructure devices, both at R&D and commercial production scale. This will ensure that these materials are readily available to the research community at large, to foster widespread development of new devices and applications. The fact that our process technology is compatible with present microfabrication and with future nanofabrication ensures that the resulting devices will be rapidly transitioned to the market, and readily available in production quantities and at reasonable costs, for both military and commercial applications.

Keywords:
Heterostructures, Nano Electronics, Oxides, Thin Films, Epitaxy, 2d Electron Gas, Memory, Logic